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MKS / ENI OEM-12B-02 RF Plasma Generator AMAT Part Number: 0190-70080 REV A Input: 200-240 VAC, 1 ph, 3 wire, 20 A Max. 1250W High-Frequency RF Power for Plasma Applications: * Microprocessor-Based Control Frequency/Stability: 13.56MHz / ±0.005% Rated Power Output: 1250W into 50 Ohm load Mismatched Power Output (Worst phase forward power referenced to rating): * 1250W nominal into 1.5:1 VSWR * 1000W nominal into 2.0:1 VSWR * 800W nominal into 3.0:1 VSWR Dynamic Power Range: < 6W to 1250W Power Margin RF: ([Open Loop Max Power/Rated Power]-1) X 100% = 50% nominal Load Impedance Range: Unlimited RF Stability / Spurious Output: Unconditionally stable for any load within operational limits / < -60dBc Harmonic Output/ Distortion: < -55dBc Load Mismatch Protection: Automatic; fwd power limits typically 0.3ms after rev. power reaches 300W or power amplifier current exceeds preset limit. * Front Panel or Remote Power Control Range: 0 to +10VDC; Slope: 125W/V * AC Line-to-Power: 0.1% typical, 0.5% max. change in output power over rated AC line voltage range. * Regulation Tolerance: ±1.5% of Set Point ±6W from < 6 to 1250W at 1.0:1 to 1.1:1 Load VSWR. Subject to limits of Forward & Reverse Power and Current. Accuracy relative to ENI Power Standard. Linearity (deviation from straight line): 12B: 190-252VAC selectable in 4 ranges with taps per table below; single phase 47-63Hz at 20A or less. Cooling System: Water flow at 1.2 Gal/Min (4.5 liters) minimum at +5 degrees to +35 degrees C. Connections provided to accept 1/4" male (NPT) pipe thread Safety Compliance: UL Listed as Misc. Electrical Equipment; certified to EN60950: 1992; A1:1993?A2:A993; DIN VDE 0160: 1988; A2:1989 Power Indicator: 0 to 1400W Fwd/Rev power display on front panel; accuracy is ±4% of full scale Analog: Subminiature Type D 15-pin or 25-pin analog Digital: Subminiature Type D 9-pin * RF Power On: +13-24VDC enables power * RF On, Overtemperature & Maximum RF * Power Indicators: Optoisolated (please look at our rules and privacy policy) |
RBarton@machine--tools.com (Ronald Barton) for additional information. This email is used for forwarding to newsgroup user.
