The 8160 series gas flow controllers control gas flows using a high precision electromagnetic valve responding to flow measurements through a sensor using the thermal properties of gases. Since the thermal mass flow measurement is independent of pressure and temperature, this method provides a stable measurement with changing process conditions. (This file is a PDF file. You will need a PDF Reader to view it. You can download one by clicking on one of the following: Adobe Acrobat Reader, Foxit PDF Reader.) (Please click on an image to enlarge it.) Telephone: (***)493-6305 Fax: (***)493-5782 Monday-Thursday 6:30am-5:00pm (CST) (please look at our rules and privacy policy) |
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